JPH01171030U - - Google Patents
Info
- Publication number
- JPH01171030U JPH01171030U JP6911688U JP6911688U JPH01171030U JP H01171030 U JPH01171030 U JP H01171030U JP 6911688 U JP6911688 U JP 6911688U JP 6911688 U JP6911688 U JP 6911688U JP H01171030 U JPH01171030 U JP H01171030U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- liquid
- coating nozzle
- coating
- amount
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims 4
- 238000000576 coating method Methods 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6911688U JPH01171030U (en]) | 1988-05-24 | 1988-05-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6911688U JPH01171030U (en]) | 1988-05-24 | 1988-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01171030U true JPH01171030U (en]) | 1989-12-04 |
Family
ID=31294407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6911688U Pending JPH01171030U (en]) | 1988-05-24 | 1988-05-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01171030U (en]) |
-
1988
- 1988-05-24 JP JP6911688U patent/JPH01171030U/ja active Pending
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